Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Erwan Morel"'
Publikováno v:
Journal of Applied Physics. 133:153301
Conventional magnetron discharge is a widely used technology for many applications. In the last decade, the high current density sputtering regime has been an interesting alternative for tailoring thin film properties. In this paper, we focused on th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51229112b89b0fde4e7cd4669fca814a
https://doi.org/10.1063/5.0145547
https://doi.org/10.1063/5.0145547
Autor:
Abderzak El Farsy, Erwan Morel, Yoann Rozier, Ludovic de Poucques, Jacques Robert, Tiberiu Minea
Publikováno v:
Plasma Sources Science and Technology. 31:12LT01
Tunable diode laser absorption spectroscopy is applied to measure the density and gas temperature of helium metastable (23S1) in the ionization region of magnetron discharge operated at very high current density ( 10\,{\text{A}}\,{\text{c}}{{\text{m}
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53572471902ec48f5af031693e4c72b8
https://doi.org/10.1088/1361-6595/acacc4
https://doi.org/10.1088/1361-6595/acacc4
Publikováno v:
Europhysics Letters. 138:24001
Glow discharges are known to be limited for running at high currents (−2). Magnetically enhanced plasmas could overcome this limitation, typically for the magnetron operated in pulsed mode during a few 100μs. Hence, the current density could be in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a20f43588259dceed90f5201149490fb
https://doi.org/10.1209/0295-5075/ac2e2b
https://doi.org/10.1209/0295-5075/ac2e2b
Autor:
Erwan Morel, Yoann Rozier, Tiberiu Minea, Alain Girodet, Christophe Creusot, Remy Bazinette, Charles Ballages, Thomas Forchard
Publikováno v:
Plasma Sources Science and Technology. 30:125001
Conventional magnetron discharge with a graphite target is a technology used worldwide to deposit thin films for a large range of applications. In the last decade, the high current density sputtering regime stands out as a very interesting alternativ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::464b26e2a1ed9a9654eddb6a313c9f57
https://doi.org/10.1088/1361-6595/ac3341
https://doi.org/10.1088/1361-6595/ac3341
Autor:
Telma Gimenez, Celia Cristina Contreras Asturias, Ligia Cortés Cárdenas, Seongsook Choi, Natalie Rangel Gamiño, Melba Libia Cárdenas, Lilia Irlanda Villegas Salas, Nora M. Basurto Santos, Mônica Ferreira Mayrink O’Kuinghttons, Anaís Elsa Cabrera Loranca, Ana Cecilia Villareal Ballesteros, Isaac Frausto Hernández, Amanda Jane Howard, Arturo Ramírez Hernández, María Claudia Nieto Cruz, María Magdalena Hernández Alarcón, Joselyn Yépez Enríquez, Nhora Lucía Reyes Navarro, Erwan Morel, Lorena López Cupita, Liliana Sosa Dorantes, José Miguel Barajas García, Keith Richards, Irlanda Olave Moreno, Judy Sharkey, Irasema Mora Pablo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e20edee244587252f2cf67cb614cefa5
https://doi.org/10.25009/uv.2142.716
https://doi.org/10.25009/uv.2142.716
