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pro vyhledávání: '"Ernst Obeneier"'
Autor:
Ernst Obeneier, Charles E. Hunt, McDonald Robinson, Stefan F. Zappe, Jeff J. Petersoa, Richard C. Westhoff
Publikováno v:
MRS Proceedings. 535
Mobilities in Si1-x-yGex Cy layers were measured using mesa etched Van der Pauw structures for alloy layers with 0 < x < 0.30 and 0 < y < 0.02 and doping levels of 1015 < N < 1018 cm-3. Mobilities in Si1-x-yGex Cy layers with x = 0.27 were found to a