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pro vyhledávání: '"Erin Maines"'
Autor:
Brendan Luke, Erin Maines, Brandon M. Rawlings, William K. Bell, Andrew R. Dick, Paul A. Kohl, C. Grant Willson, Brennan Mueller
Publikováno v:
Advances in Patterning Materials and Processes XXXII.
A photosensitive polyimide system based on amine catalyzed imidization of a precursor poly(amic ester) is described. The material is based on the meta ethyl ester of pyromellitic dianhydride and 2,2’ bis(trifluoromethyl)benzidine and acts as a nega
Autor:
Brendan Luke, Andrew R. Dick, William K. Bell, Brandon M. Rawlings, Erin Maines, C. Grant Willson, Brennen K. Mueller, Paul A. Kohl
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 15:033503
A photosensitive polyimide system based on amine catalyzed imidization of a precursor poly(amic ester) is described. The material is based on the meta ethyl ester of pyromellitic dianhydride and 2,2’ bis(trifluoromethyl)benzidine. It acts as a nega