Novel Test Structures for Dedicated Temperature Budget Determination

Autor: Erik Jouwert Faber, Jurriaan Schmitz, Robertus A.M. Wolters

Publikováno v: IEEE transactions on semiconductor manufacturing, 25(3), 339-345. IEEE

We present a novel method for determining the temperature budget of the process side of silicon substrates and chips, based on well-known silicide formation reactions of metal–Si systems and (four-point probe) resistance measurements. In this paper

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f424aee4b4dcaa9a4aa9f7e2737519a9
https://doi.org/10.1109/tsm.2012.2202793

Gap-closing test structures for temperature budget determination

Autor: Jurriaan Schmitz, R.A.M. Wolters, Erik Jouwert Faber

Publikováno v: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 165-169
STARTPAGE=165;ENDPAGE=169;TITLE=24th International Conference on Microelectronic Test Structures, ICMTS 2011

We present the extension of a method for determining the temperature budget of the process side of silicon substrates and chips, employing silicide formation reactions. In this work, silicon-on-insulator type substrates are used instead of bulk silic

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5ae84a2fec69483148baab71aeb3d7e7
https://doi.org/10.1109/icmts.2011.5976840

pH sensitivity of Si--C linked organic monolayers on crystalline silicon surfaces

Autor: Erik Jouwert Faber, Wouter Olthuis, Wilrike Groeneveld, Han Zuilhof, Ernst J. R. Sudhölter, Piet Bergveld, Wouter Sparreboom, Louis C. P. M. de Smet, Albert van den Berg, Johan G. Bomer

Publikováno v: ChemPhysChem, 8(1), 101-112. Wiley-VCH Verlag

The electrochemical behavior of Si--C linked organic monolayers is studied in electrolyte-insulator-Si devices, under conditions normally encountered in potentiometric biosensors, to gain fundamental knowledge on the behavior of such Si electrodes un

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f85d0a2950be59a0043edf6ecf4e242d
https://pubmed.ncbi.nlm.nih.gov/17121410

On the kinetics of platinum silicide formation

Autor: Jurriaan Schmitz, Robertus A.M. Wolters, Erik Jouwert Faber

Publikováno v: Applied physics letters, 98(8). American Institute of Physics

In this work, the kinetics of platinum silicide formation for thin Pt films _50 nm_ on monocrystalline _100_ silicon is investigated via in situ resistance measurements under isothermal _197–275 °C_conditions. For Pt2Si diffusion limited growth wa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eba729b51160d9cbc07d6b499131c73e
https://doi.org/10.1063/1.3556563

Mott Schottky measurements as a probe for site-binding dynamics at electrolyte | thin-insulator | silicon structures

Autor: Erik Jouwert Faber, Groeneveld, W. H., Wouter Olthuis, Albert van den Berg

Publikováno v: University of Twente Research Information (Pure Portal)
The Sense of Contact 2004; where Industry meets Science, workshop Sensortechnology

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::927f36116cf26856b614aa58413db9ec
https://research.utwente.nl/en/publications/mott-schottky-measurements-as-a-probe-for-sitebinding-dynamics-at-electrolyte--thininsulator--silicon-structures(7f1df247-df4c-41ef-8f36-f20e69dd2e60).html