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pro vyhledávání: '"Erico Zhou"'
Autor:
Kent Liu, Jason Zhang, Hongtao Liu, Feng Zhao, Kerry Song, Wufeng Deng, Junzhu Cao, Sky Zhou, Feng Chen, Ethan Bao, Jun Zhao, Erico Zhou, Tony Hu, Larry Chen
Publikováno v:
ECS Transactions. 44:531-536
Novel CuCMP slurry was evaluated under different polishing conditions and its impact on topography, thickness and in line test performance was investigated. Generally, topography, such as dishing and erosion, results from over-polishing after Cu poli