Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Eric R. Christenson"'
Autor:
Curt Jackson, Cris Morgante, Paul C. Allen, John Manfredo, Peter D. Buck, Robert Kiefer, Vishal Garg, David Mellenthin, Jason Hickethier, Michael White, Sarah Cohen, Eric R. Christenson
Publikováno v:
SPIE Proceedings.
Currently, the ALTA 4300 generation DUV Laser tool is capable of printing critical and semi-critical photomasks for the 130nm and 90nm IC technology nodes. With improved optical elements, an improved objective lens, and a higher bandwidth data-path t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::609ac3c9363e404e611eb2ddf625b124
https://doi.org/10.1117/12.617524
https://doi.org/10.1117/12.617524
Autor:
Mike Bohan, M. Duane, Paul C. Allen, Peter Pirogovsky, Eric R. Christenson, Malik K. Sadiq, Sam C. Howells, Boaz Kenan, Michael White, Robin Teitzel, H. Dai, Henry Chris Hamaker
Publikováno v:
SPIE Proceedings.
The capability and performance of the production-proven DUV ALTA 4300 system has been extended by the development of two new optical subsystems: a 0.9 NA, 42X reduction lens and a high-bandwidth acousto-optic deflector based beam position and intensi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06ca1a304ad2952e100a66a6f85bcc76
https://doi.org/10.1117/12.637280
https://doi.org/10.1117/12.637280
Autor:
H. Christopher Hamaker, Robert Kiefer, Michael E. Ungureit, Boaz Kenan, Alan J. Wickstrom, Sam C. Howells, Michael Bohan, Curt Jackson, Eric R. Christenson, Malik K. Sadiq, Peter Pirogovsky, Paul C. Allen, Robin Teitzel, Michael White
Publikováno v:
SPIE Proceedings.
The capability of the DUV ALTAO 4300 system has been extended by the development of two new optical subsystems: a 0.9 NA, 42X reduction lens and a high-bandwidth acousto-optic deflector based beam position and intensity correction servo. The PSM over
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5091775115dc2dd91594577b4fbe8093
https://doi.org/10.1117/12.570291
https://doi.org/10.1117/12.570291
Autor:
Eric R. Christenson, Michael R. Tucker
Publikováno v:
Fiber Optic and Laser Sensors VIII.
A multiwave interferometer was developed for accurate measurements of absolute distance over distances on the order of inches. The principle of the device is based on using multiwave interferometry to create artificial wavelengths between 1 micron an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6a7a1ee262e429ce028ca95c31339bcf
https://doi.org/10.1117/12.24757
https://doi.org/10.1117/12.24757