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Publikováno v:
Discrete Mathematics. 340:2130-2133
In this note we prove the non-existence of two types of partial difference sets in Abelian groups of order 216 . This completes the classification of parameters for which a partial difference set of size at most 100 exists in an Abelian group.
Autor:
Jens Hahn, Bee Kim Hong, Marcus Dankelmann, Heiko Estel, Mario Lamm, Rainer Scheibel, Markus Czekalla, Maik Stegemann, Eric Neubert, Jens Schneider, Michael Renner
Publikováno v:
SPIE Proceedings.
The use of TiN-Hard masks for Cu metal layer patterning has become a common technique for trench first metal hard mask (TFMH) back end of line (BEOL) integration schemas. Resist rework influences the chemical and physical behavior of the TiN hard mas