Zobrazeno 1 - 10
of 64
pro vyhledávání: '"Eric Lebrasseur"'
Autor:
Akio Higo, Tomoki Sawamura, Makoto Fujiwara, Eric Lebrasseur, Ayako Mizushima, Etsuko Ota, Yukinori Ochiai, Taro Arakawa, Yoshio Mita
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 142:230-234
Publikováno v:
Journal of the Physical Society of Japan. 91
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
Recently, emulation of topological states based on electrical circuits draws much attention in view of future quantum computing. We have demonstrated a topological phase transition by switching a step-variable-resettable SOI-MEMS capacitor for the fi
Autor:
Mickaël Lallart, Giacomo Clementi, Franck Lardet-Vieudrin, Sylvain Ballandras, Eric Lebrasseur, Ausrine Bartasyte, Bernard Dulmet, Miguel Angel Suarez, Samuel Margueron, Giulia Lombardi, Ludovic Gauthier-Manuel, J. Imbaud
Publikováno v:
Mechanical Systems and Signal Processing (MSSP)
Mechanical Systems and Signal Processing (MSSP), 2021, 149 (15), pp.107171 (19)
Mechanical Systems and Signal Processing
Mechanical Systems and Signal Processing, Elsevier, 2021, 149, pp.107171. ⟨10.1016/j.ymssp.2020.107171⟩
IWPMA2020
IWPMA2020, Sep 2020, Webconference, China. pp.107171, ⟨10.1016/j.ymssp.2020.107171⟩
Mechanical Systems and Signal Processing (MSSP), 2021, 149 (15), pp.107171 (19)
Mechanical Systems and Signal Processing
Mechanical Systems and Signal Processing, Elsevier, 2021, 149, pp.107171. ⟨10.1016/j.ymssp.2020.107171⟩
IWPMA2020
IWPMA2020, Sep 2020, Webconference, China. pp.107171, ⟨10.1016/j.ymssp.2020.107171⟩
International audience; Lead-free lithium niobate (LiNbO
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f49f895267ae5d5cc8a42c7ffdc8382f
https://hal.archives-ouvertes.fr/hal-03360026
https://hal.archives-ouvertes.fr/hal-03360026
Autor:
Giacomo Clementi, Giulia Lombardi, Samuel Margueron, Miguel Angel Suarez, Eric Lebrasseur, Sylvain Ballandras, Joël Imbaud, Franck Vieudrin, Ludovic Manuel, Bernard Dulmet, Muralt, P., Mickael LALLART, Ausrine Bartasyte
Publikováno v:
Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Dec 2019, Cracovie, Poland
HAL
Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Dec 2019, Cracovie, Poland
HAL
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3897d939f6bac629477059c5811c69bc
https://hal.archives-ouvertes.fr/hal-02867732
https://hal.archives-ouvertes.fr/hal-02867732
Autor:
Giacomo Clementi, Giulia Lombardi, Samuel Margueron, Miguel Angel Suarez, Eric Lebrasseur, Sylvain Ballandras, Bernard Dulmet, Mickael LALLART, Ausrine Bartasyte
Publikováno v:
International Workshop on Piezoelectric Materials and Applications on Actuators 2019 and Enhance Workshop
International Workshop on Piezoelectric Materials and Applications on Actuators 2019 and Enhance Workshop, Oct 2019, Lyon, France
HAL
International Workshop on Piezoelectric Materials and Applications on Actuators 2019 and Enhance Workshop, Oct 2019, Lyon, France
HAL
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::f75cb423eab54429b7e37299513c3bdb
https://hal.archives-ouvertes.fr/hal-02867733
https://hal.archives-ouvertes.fr/hal-02867733
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 30:201-208
Test structures were developed to visualize the progress of the dry release of an MEMS device fabricated by deep reactive ion etching (DRIE). Because of the high aspect ratio of DRIE MEMS devices, the undercut progress cannot be observed from the sur
Autor:
Giacomo Clementi, Samuel Margueron, Giulia Lombardi, Miguel Angel Suarez, Eric Lebrasseur, Sylvain Ballandras, Bernard Dulmet, Mickael LALLART, Ausrine Bartasyte
Publikováno v:
F2Cπ2 2019
F2Cπ2 2019, Jul 2019, Lausanne, Switzerland
HAL
F2Cπ2 2019, Jul 2019, Lausanne, Switzerland
HAL
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::5929e770e085f01173bbfcb6cb9fd740
https://hal.archives-ouvertes.fr/hal-02867734
https://hal.archives-ouvertes.fr/hal-02867734
Autor:
S. Inoue, Svetlana Mintova, Kentaro Yamada, Eric Lebrasseur, Corentin Jorel, Mathieu Pouliquen, Julien Grand, Yuki Okamoto, Maxime Debost, Olivier de Sagazan, Matthieu Denoual, Didier Robbes, Maxime Harnois, Yoshio Mita
Publikováno v:
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752802⟩
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752802⟩
International audience; In this paper, we show the integration steps we have undertaken for the integration of a recently proposed new principle for gas detection. Benefits of integration and co-integration of the miniaturized detectors with CMOS ele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::73cbfcb9b0b59966f5354192238575f0
https://hal.archives-ouvertes.fr/hal-02531336
https://hal.archives-ouvertes.fr/hal-02531336
Autor:
Etsuko Ota, Ayako Mizushima, Eric Lebrasseur, Akio Higo, Tomoki Sawamura, Yoshio Mita, Makoto Fujiwara, Taro Arakawa
Publikováno v:
2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS).
High-throughput electron beam (EB) lithography technologies such as variable shape beam (VSB) and character projection (CP) are drawing much interests to the industries due to the wafer scale exposure capability and reduced exposure time in the order