Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Eric Gaumont"'
Autor:
Thilo Sandner, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck, Jan Grahmann
Publikováno v:
Micromachines, Vol 11, Iss 10, p 883 (2020)
We present a wafer-level vacuum-packaged (WLVP) translatory micro-electro-mechanical system (MEMS) actuator developed for a compact near-infrared-Fourier transform spectrometer (NIR-FTS) with 800–2500 nm spectral bandwidth and signal-nose-ratio (SN
Externí odkaz:
https://doaj.org/article/59876b9d62dd43bc8c0cc8b5224a03f6
Publikováno v:
Journal of Materials Science: Materials in Electronics. 30:20285-20291
In the quest of low-stress M(O)EMS packaging, in this study, low-temperature adhesive bonding methodologies facilitated by inkjet printing technology were investigated. M(O)EMS devices contain fragile components and are very susceptible to external d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d34fe72cf8dd8058c8cf96ae9e21f60c
https://doi.org/10.1007/s10854-019-02413-7
https://doi.org/10.1007/s10854-019-02413-7
Autor:
Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Jan Grahmann, Thilo Sandner, Gerald Auböck, Eric Gaumont
Publikováno v:
Micromachines
Micromachines, Vol 11, Iss 883, p 883 (2020)
Volume 11
Issue 10
Micromachines, Vol 11, Iss 883, p 883 (2020)
Volume 11
Issue 10
We present a wafer-level vacuum-packaged (WLVP) translatory micro-electro-mechanical system (MEMS) actuator developed for a compact near-infrared-Fourier transform spectrometer (NIR-FTS) with 800&ndash
2500 nm spectral bandwidth and signal-nose-
2500 nm spectral bandwidth and signal-nose-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b12690d3a2c59eb0b8bbba564fd0535d
http://europepmc.org/articles/PMC7598276
http://europepmc.org/articles/PMC7598276
Publikováno v:
International Conference on Space Optics — ICSO 1997.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5330bef9b220c2f4a2aa08954dc113e7
https://doi.org/10.1117/12.2326562
https://doi.org/10.1117/12.2326562
Autor:
Jan Grahmann, Thomas Grasshoff, Thomas Gisler, A. Kenda, Andreas Herrmann, Eric Gaumont, Thilo Sandner, Gerald Auböck, Sergiu Langa
Publikováno v:
MOEMS and Miniaturized Systems XVII.
A translatory MOEMS actuator with extraordinarily large stroke - especially developed for fast optical path-length modulation in miniaturized FT-spectrometers (FTS) designed for NIR spectral region (800 nm – 2500 nm) - is presented. A precise trans
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d9682025386dc67d0f89adfd7eceba5
https://doi.org/10.1117/12.2290588
https://doi.org/10.1117/12.2290588
A translatory MOEMS actuator with extraordinary large stroke especially developed for fast optical path length modulation in miniaturized Fourier transform infrared spectrometers (FTSs) is presented. A precise translational out-of-plane oscillation a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c6a2135a39a719df4120fb7116da1cb0
https://publica.fraunhofer.de/handle/publica/236589
https://publica.fraunhofer.de/handle/publica/236589
Publikováno v:
SPIE Proceedings.
New MEMS device are perpetually being proposed and concepts are approved by means of demonstrator devices. Volume production of MEMS however requires more. The fabrication process must be suitable for large numbers of wafers at acceptable cost and yi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::437abae2f8a6b7b094e813c59c848eb0
https://doi.org/10.1117/12.545247
https://doi.org/10.1117/12.545247
Publikováno v:
SPIE Proceedings.
The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that ar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7884c7528584323e1179b40eecf342f8
https://doi.org/10.1117/12.530795
https://doi.org/10.1117/12.530795
Publikováno v:
MOEMS Display and Imaging Systems.
The Fraunhofer Institute of Microelectronic Circuits and Systems, Dresden, has been developing resonant Micro Scanning Mirrors for several years. They are designed for large deflection angles at low driving voltages in resonant operation. A couple of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1fd96f9ef6f6007c2e2a0513bcdff88
https://doi.org/10.1117/12.472863
https://doi.org/10.1117/12.472863
Publikováno v:
Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614).
We present results of failure and reliability investigations on silicon Micro Scanning Mirrors. The electrical insulation resistance, mechanical shock resistance and long-run stability were characterized. By design optimization including a combinatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2d2a802f303d0212b07cc042c7785c6d
https://doi.org/10.1109/ipfa.2002.1025665
https://doi.org/10.1109/ipfa.2002.1025665