Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Emmanuel P. Quevy"'
Publikováno v:
3D and Circuit Integration of MEMS
Publikováno v:
Proceedings of the IEEE. 96:306-322
Microfabrication technologies initially developed for integrated electronics have been successfully applied to batch-fabricate a wide variety of micromechanical structures for sensing, actuating, or signal-processing functions such as filters. By app
Autor:
Emmanuel P. Quevy, Justin Black, Jeffrey Bokor, Roger T. Howe, Richard M. White, Alvaro San Paulo
Publikováno v:
Microelectronic Engineering. 84:1354-1357
The application of atomic force microscopy (AFM) for mode shape imaging of both out-of-plane and in-plane vibrating RF micromechanical resonators is described in this work. The modulation of the amplitude of the resonator together with the lock-in de
Publikováno v:
IEEE Electron Device Letters. 25:529-531
A process is demonstrated for fabrication of high-frequency mechanical resonators applicable for on-chip radio-frequency communication. This Ge-blade damascene process (GBDP) provides ultranarrow lateral gaps using lithographically defined sacrificia
Autor:
Pedram Mohseni, Emmanuel P. Quevy
Publikováno v:
CICC
The miniaturization of biomedical and sensor systems for point-of-care diagnostics and embedded electronics has garnered increased attention in the integrated circuit community in recent years. In this session, six papers representing advances in the
Publikováno v:
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).
This paper reports internal electrostatic transduction of the 41st radial bulk-mode of a ring resonator at 2.75GHz with a quality factor of 7200 in air. The transducer electrodes are integrated within the vibrating structure in a dense serpentine pat
Publikováno v:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
This paper reports the use of internal electrostatic transduction to excite and detect the fifth bulk lateral mode of a 54µm outer-diameter, 12µm-wide, and 2.5µm-thick poly-silicon ring resonator at 1.95GHz, with a quality factor Q∼8000 in room
Publikováno v:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
This paper reports the parallel internal electrostatic transduction of a laterally driven Lame-mode polysilicon resonator. This resonator is fabricated using a manufacturable double nanogap process that provides ultrathin high-aspect ratio lateral ga
Publikováno v:
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
This paper describes a microelectromechanical resonator interface to a nanomechanical structure. Our approach to microresonator-nanowire integration employs silicon nanowires as mechanical tuning elements, which perturb the frequency response of the
Publikováno v:
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
This paper demonstrates an electrostatic transducer for lateral contour-mode resonators in which the transduction gaps are filled with a liquid dielectric (water) having much higher permittivity than air ( kappawater = 80.1). Aqueous transduction is