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pro vyhledávání: '"Emmanuel Oghdayan"'
Autor:
Carlos Morote, Thomas Massin, Philippe Garnier, Jeffrey M. Lauerhaas, Corentin Chatelet, Emmanuel Oghdayan, Jeffery W. Butterbaugh
Publikováno v:
Solid State Phenomena. 314:107-112
Silicon nitride is commonly etched by hot orthophosphoric acid. Hot diluted hydrofluoric acid is hereby used as an alternative. Nonetheless, in presence of silicon surfaces, some corrosion has been evidenced, degrading significantly active areas duri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c03e5612503e960ce94a3ada04209afe
https://doi.org/10.4028/www.scientific.net/ssp.314.107
https://doi.org/10.4028/www.scientific.net/ssp.314.107
