Coupling Between Finite Ground Coplanar Waveguides Embedded in Polyimide Layers for 3D-MMICs on Si

Autor: Emmanoui M. Tentzeris, George E. Ponchak, John Papapolymerou

Publikováno v: Ponchak, George E. ; Papapolymerou, John ; Tentzeris, Emmanouil M. (2001) Coupling Between Finite Ground Coplanar Waveguides Embedded in Polyimide Layers for 3D-MMICs on Si. In: Gallium Arsenide applications symposium. GAAS 2001, 24-28 september 2001, London.

Three-dimensional circuits built upon multiple layers of polyimide are required for constructing Si/SiGe monolithic microwave/mm-wave integrated circuits on low resistivity Si wafers. However, the closely spaced transmission lines are susceptible to

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