Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Emma Brouk"'
Dimensionally and thermally stable polymer, containing disordered graphitic structure and adamantane
Publikováno v:
Journal of Polymer Science Part A: Polymer Chemistry. 44:6909-6925
In an attempt to develop a low-k interlayer dielectric, adamantane-diphenyldiethynyl moiety containing oligomer is prepared. Oligomerization of 1,3,5,7-tetrakis[3/4-ethynylphenyl]adamantane (4) is accomplished by a Glaser–Hay oxidative coupling wit
Autor:
Mehari Stifanos, Amanuel Gebrebrhan, Nancy Iwamoto, Ahila Krishnamoorthy, Deborah Yellowaga, Edward W. Rutter, Richard Spear, Emma Brouk
Publikováno v:
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems.
Molecular modeling was employed to understand various properties found in thick film dielectric layers derived from solution-based sol-gel formulation in order to aid their development. For instance, for formulations used as planarizing layers, it wa
Autor:
Emma Brouk, Brian J. Daniels, Mehari Stifanos, Ahila Krishnamoorthy, Peter Smith, Jinghong Chen, Jan Nedbal
Publikováno v:
MRS Proceedings. 936
We present recent advances on spin-on polymers as gate dielectric for thin film transistors. We have developed film type I with significantly improved dielectric properties. At a curing temperature of 250 °C, the dielectric constant is 3.46, the bre
Autor:
Roger Y. Leung, Emma Brouk, Tiffany Nguyen, Wenya Fan, Jason Stuck, Jaswinder Gill, Songyuan Xie, Bo Li, Nancy Iwamoto, Shilpa Thanawala, Joseph Kennedy, Faith Zhou, Lei Jin, Kim Do
Publikováno v:
SPIE Proceedings.
A spin-on sacrificial 193 nm UV absorbing organosiloxane film was developed to facilitate ArF photoresist (PR) patterning. To improve lithographic compatibility with acrylate based photoresists, different performance additives were evaluated as photo
Autor:
Ahila Krishnamoorthy, Mehari Stifanos, Wenya Fan, Jinghong Chen, Jeff Rose, Brian J. Daniels, Jan Nedbal, Emma Brouk, Peter Smith
Publikováno v:
SID Symposium Digest of Technical Papers. 37:1878
We present spin-on polymer films with significantly improved dielectric properties for TFT gate dielectric applications. Breakdown voltage//leakage current//CV hysteresis are 4.10 MV/cm at 1 μA/cm2//4.9 × 10−8 A/cm2 at 2.5 MV/cm//3.4 V and 4.73 M