Zobrazeno 1 - 1
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pro vyhledávání: '"Emil Schmit-Weaver"'
Autor:
Ryoung-han Kim, Hiroyuki Mizuno, Bart Kessels, Robert Routh, Emil Schmit-Weaver, John C. Arnold, Kevin Cummings, Uzodinma Okoroanyanwu, Bruno M. LaFontaine, Andre van Dijk, Tom Wallow, Kurt R. Kimmel, Dave Medeiros, Chiew-seng Koay, Obert R. Wood, Michael Crouse, Yunfei Deng, Cyrus E. Tabery, Brian Niekrewicz, Judy Galloway, Karen Petrillo, Satyavolu S. Papa Rao, Youri van Dommelen, Sjoerd Lok, Brian Lee, Anna Tchikoulaeva, Yunpeng Yin, Harry J. Levinson, James Word, Bill Pierson, Don Canaperi, Rolf Seltmann, Matthew E. Colburn, Erin Mclellan, Sang-In Han, Sarah N. McGowan, Sander Bouten
Publikováno v:
SPIE Proceedings.
In this paper, we describe the integration of EUV lithography into a standard semiconductor manufacturing flow to produce demonstration devices. 45 nm logic test chips with functional transistors were fabricated using EUV lithography to pattern the f