Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Emi Kawamura"'
Autor:
De-Qi Wen, Janez Krek, Jon Tomas Gudmundsson, Emi Kawamura, Michael A. Lieberman, John P. Verboncoeur
Publikováno v:
IEEE Transactions on Plasma Science. 50:2548-2557
Autor:
De-Qi Wen, Janez Krek, Jon Tomas Gudmundsson, Emi Kawamura, Michael A. Lieberman, Peng Zhang, John P Verboncoeur
Publikováno v:
Plasma Sources Science and Technology.
In the past three decades, first principles-based fully kinetic Particle-in-Cell Monte Carlo collision (PIC/MCC) simulations have been proven to be an important tool for the understanding of the physics of low pressure capacitive discharges. However,
Standing wave instability in large area capacitive discharges operated within or near the gamma mode
Publikováno v:
Plasma Sources Science and Technology. 31:114007
Large-area capacitive discharges used for plasma deposition operate in a regime where both electromagnetic and secondary electron emission effects are important. The standing wave shortened wavelength in the presence of plasma depends on the sheath s
Autor:
Janez Krek, John P. Verboncoeur, Emi Kawamura, Michael A. Lieberman, De-Qi Wen, Jon Tomas Gudmundsson
Publikováno v:
2021 IEEE International Conference on Plasma Science (ICOPS).
Particle-in-cell Monte Carlo collision (PIC/MCC) simulations are important for understanding low pressure low-temperature discharge dynamics, since no assumptions are needed to determine the electron energy distribution function. Benchmark work is ne
Publikováno v:
Plasma Sources Science and Technology
Plasma Sources Science and Technology, IOP Publishing, 2021, 30 (3), pp.035001. ⟨10.1088/1361-6595/abde22⟩
Plasma Sources Science and Technology, IOP Publishing, 2021, 30 (3), pp.035001. ⟨10.1088/1361-6595/abde22⟩
We perform one-dimensional (1D) particle-in-cell (PIC) simulations to study the α and γ modes in an intermediate pressure 1.6 Torr, 2.5 cm gap capacitive nitrogen discharge driven at 13.56 MHz with current density amplitudes J 0 = 7 to 150 A m−2.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::abfd0aafe2802ca0b7d9a01f93201fe0
https://hal.archives-ouvertes.fr/hal-03200269
https://hal.archives-ouvertes.fr/hal-03200269
Publikováno v:
Physics of Plasmas. 29:013508
Autor:
Tadaaki Shimizu, Toshie Matsumura, Toshiya Kagawa, Emi Kawamura, Hiroaki Kosaka, Hideki Hashimoto, Hiroki Yoshimura
Publikováno v:
IEEJ Transactions on Electronics, Information and Systems. 138:950-956
Publikováno v:
Plasma Sources Science and Technology. 30:125011
One-dimensional particle-in-cell/Monte Carlo collisional simulations are performed on a capacitive 2.54 cm gap, 1.6 Torr argon discharge driven by a sinusoidal rf current density amplitude of 50 A m−2 at 13.56 MHz. The excited argon states (metasta
Autor:
John P. Verboncoeur, Michael A. Lieberman, Jon Tomas Gudmundsson, De-Qi Wen, Emi Kawamura, Janez Krek
Publikováno v:
Plasma Sources Science and Technology. 30:105009
The capacitive argon discharge operated in the intermediate pressure regime is studied by performing one-dimensional particle-in-cell Monte Carlo collision simulations. First, the basic object-oriented plasma device code (oopd1-v1) is strictly benchm
Publikováno v:
Plasma Sources Science and Technology. 30:045017
The standing wave effect, which may lead to center-high density profiles in high frequency capacitive discharges, can be enhanced by nonlinearly excited harmonics. In this work, a nonlinear transmission line model, which solves for the electromagneti