A capacitive rf power sensor based on mems technology

Autor: Fernandez, L.J., Wiegerink, Remco J., Flokstra, Jakob, Flokstra, Jan, Sesé, J., Jansen, Henricus V., Elwenspoek, Michael Curt

Publikováno v: Journal of micromechanics and microengineering, 16(IEEE Produ):10.1088/0960-1317/16/7/001, S1099-S1107. Institute of Physics (IOP)

Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the electrostatic force between an RF signal line and a suspended membrane. The electrostatic force, which is proportional to the square of the rms signal voltage and th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d7388192fb5e532abd2b86fc3b465c52
https://doi.org/10.1088/0960-1317/16/7/001

The electrolysis of water: An actuation principle for MEMS with a big opportunity

Autor: Rusu, C.R., Neagu, Cristina, Jansen, Henricus V., Gardeniers, Johannes G.E., Elwenspoek, Michael Curt

Publikováno v: Mechatronics, 10(4), 571-581. Elsevier
Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany, 118-121
STARTPAGE=118;ENDPAGE=121;TITLE=Actuator 98

In this paper the theory of water electrolysis in a closed electrochemical cell, that contains two electrodes, an electrolyte and a pressure sensor is described. From the leakage and electrochemical experiments done with this macrocell it is possible

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c5da792cb30fb7b18eef041908bcc6d2
http://eprints.eemcs.utwente.nl/secure2/13148/01/M_10_571.pdf

A fabrication process for electrostatic microactuators with integrated gear linkages

Autor: Legtenberg, R., Legtenberg, Rob, Berenschot, Johan W., Elwenspoek, Michael Curt, Fluitman, J.H.J.

Publikováno v: Journal of microelectromechanical systems, 6(3), 234-241. IEEE

A surface micromachining process is presented which has been used to fabricate electrostatic microactuators. These microactuators are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear lin

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b689d2594770128a24fed66ad0fc85c6
https://doi.org/10.1109/84.623112

Anisotropic reactive ion etching of silicon using SF6/O2/CHF3 gas mixtures

Autor: Legtenberg, R., Legtenberg, Rob, Jansen, Henricus V., de Boer, Meint J., Elwenspoek, Michael Curt

Publikováno v: Journal of the Electrochemical Society, 142(6), 2020-2028. The Electrochemical Society Inc.

Reactive ion etching of silicon in an RF parallel plate system, using SF6/O2/CHF3, plasmas has been studied. Etching behavior was found to be a function of loading, the cathode material, and the mask material. Good results with respect to reproducibi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5548cdb6e8f6b315e6a510085919c7d3
https://doi.org/10.1149/1.2044234

Combustion of hydrogen-oxygen mixture in nanobubbles

Autor: Svetovoy, Vitaly, Sanders, Remco G.P., Lammerink, Theodorus S.J., Elwenspoek, Michael Curt, Starik, A.M., Frolov, S.M., Roy, G.D.

Publikováno v: Nonequilibrium processes in plasma, combustion, and atmosphere, 201-208
STARTPAGE=201;ENDPAGE=208;TITLE=Nonequilibrium processes in plasma, combustion, and atmosphere

Observation of a spontaneous reaction between hydrogen and oxygen in bubbles in water whose diameter is smaller than a threshold value around 150 nm is presented. The effect is attributed to high Laplace pressure and to fast dynamics in nanobubbles a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::9b02186aa00ef0cf5d47405a1859c43a
https://research.utwente.nl/en/publications/combustion-of-hydrogenoxygen-mixture-in-nanobubbles(410a653b-3bef-43c3-8362-20fdd3a3f830).html