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pro vyhledávání: '"Elvira S. Zhigley"'
Autor:
Ekaterina V. Shishkova, Ilya I. Tumkin, Vladimir A. Kochemirovsky, Elvira S. Zhigley, M. D. Bal’makov, L. S. Logunov, S. V. Safonov
Publikováno v:
Surface and Coatings Technology. 264:187-192
Microelectronics industry is growing fast and the rate of new devices' development increases every year. Therefore, methods for simple and high-precision metal coating on dielectrics are needed. Existing methods do not allow performing the high-preci
Publikováno v:
SPIE Proceedings.
Local molybdenum deposit obtainment is promising for micro thermocouples creation on dielectric surfaces. This paper is dedicated to development of method of laser-induced molybdenum deposition from water-based solution of inorganic salt on Sitall st