Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Eloi Marigó"'
Publikováno v:
Sensors, Vol 15, Iss 7, Pp 17036-17047 (2015)
A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a sin
Externí odkaz:
https://doaj.org/article/ab0b480129fb44e0b59586de5399db09
Autor:
Eyglis Ledesma, Iván Zamora, Francesc Torres, Arantxa Uranga, Vassil Tzanov, Nuria Barniol, Eloi Marigó, Mohan Soundara-Pandian
Publikováno v:
Proceedings, Vol 2, Iss 13, p 925 (2018)
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding c
Externí odkaz:
https://doaj.org/article/4e77f9f21df04cbeaa3a816df7f58f0e
Publikováno v:
Micromachines, Vol 7, Iss 3, p 40 (2016)
We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementar
Externí odkaz:
https://doaj.org/article/0860b0bdf41a4b1db709b71f308eea5a
Autor:
Aslam, Muhammad Zubair, Jeoti, Varun, Karuppanan, Saravanan, Pandian, Mohanraj Soundara, Ferrer, Eloi Marigo, Suresh, Kasyap
Publikováno v:
In Sensors and Actuators: A. Physical 1 October 2020 313
Publikováno v:
In Microelectronic Engineering October 2012 98:458-462
Akademický článek
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Publikováno v:
PLoS ONE, Vol 11, Iss 7, p e0158954 (2016)
Micro-electro mechanical system (MEMS) based oscillators are revolutionizing the timing industry as a cost effective solution, enhanced with more features, superior performance and better reliability. The design of a sustaining amplifier was triggere
Externí odkaz:
https://doaj.org/article/a7799d82947a4fc18861e313aa84cf66