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Publikováno v:
Integrated Ferroelectrics. 37:39-46
Platinum (Pt) is a viable electrode material for use with ferroelectric films to form FeRAM cells. Due to the chemical stability of Pt etching at low-temperature, drawbacks like tapered Pt profiles with poor CD control and low mean time between clean
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0077edb9577510d33dfd7807512c280e
https://doi.org/10.1080/10584580108015663
https://doi.org/10.1080/10584580108015663
