Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Elin Steinsland"'
Publikováno v:
Sensors and Actuators A: Physical. 86:73-80
Laser reflectance interferometry has been used to measure in situ etch rates of (100), (110) and (111) single-crystal silicon planes in 5–35 wt.% tetramethyl ammonium hydroxide (TMAH) solutions. The laser reflectance method was seen to give very ac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::517b8c6bcee50c6f7d6becbf8153db3d
https://doi.org/10.1016/s0924-4247(00)00309-5
https://doi.org/10.1016/s0924-4247(00)00309-5
Publikováno v:
Journal of The Electrochemical Society. 146:3890-3895
The etch rate of crystalline silicon in liquid solutions has been measured in situ by laser reflectance interferometry. A simple method has been developed which allows accurate real‐time observation of the etch rate as a function of etching paramet
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a730f47fe846d5cbaa99dbf50dfeb47a
https://doi.org/10.1149/1.1392568
https://doi.org/10.1149/1.1392568
Autor:
Anders Hanneborg, Elin Steinsland, Gjermund Kittilsland, M. Nese, Ralph W. Bernstein, Halle Sandmo
Publikováno v:
Sensors and Actuators A: Physical. 54:728-732
Etch rates of single crystal silicon in tetramethyl ammonium hydroxide (TMAH) solutions have been measured as a function of boron doping concentration with the purpose of studying the feasability of an etch stop. The boron concentration has been vari
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5440942a7c8823f9658b1ed1242a9c88
https://doi.org/10.1016/s0924-4247(97)80047-7
https://doi.org/10.1016/s0924-4247(97)80047-7
Publikováno v:
Scopus-Elsevier
This paper reports on a simple method for in situ monitoring of silicon etch rate in watery solutions by laser reflectance interferometry. Accurate measurements of etch rate can be obtained by long term etching on one sample. All changes in etch rate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5d988647611e3bf244dde745bdace64b
https://doi.org/10.1109/sensor.1997.613750
https://doi.org/10.1109/sensor.1997.613750
Publikováno v:
Advances in Experimental Medicine and Biology ISBN: 9781461360513
Tumors develop an abnormal vascular architecture during growth, resulting in poor perfusion and the occurrence of vessels with intermittent circulation, stasis, and thrombosis1,2. Local areas with hypoxic and anoxic cells, acid pH, and necrotic tissu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::747ab97f444caaa65ff14fba82235382
https://doi.org/10.1007/978-1-4615-2468-7_71
https://doi.org/10.1007/978-1-4615-2468-7_71
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