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Autor:
Elie Cobo, Sébastien Massenot, Alexandre Le Roch, Franck Corbière, Vincent Goiffon, Pierre Magnan, Jean-Luc Pelouard
Publikováno v:
Applied optics. 61(4)
Complementary metal–oxide semiconductor (CMOS) image sensor sensitivity in the near-infrared spectrum is limited by the absorption length in silicon. To deal with that limitation, we evaluate the implementation of a polysilicon nano-grating inside