Characterising Backscattered Electrons in EBCMOS

Autor: Xuening Wang, De Song, Gangcheng Jiao, Ye Li, Weijun Chen

Publikováno v: IEEE Photonics Journal, Vol 14, Iss 6, Pp 1-5 (2022)

The characteristics of backscattered electrons near the surface of a back-side bombarded CMOS (BSB-CMOS) within an electron bombarded CMOS (EBCMOS) were studied based on the principle of electron-solid interactions and Monte-Carlo simulation method.

Externí odkaz: https://doaj.org/article/8573be8dd3204d7196b904711e614624

Electron beam deposition for nanofabrication

Autor: W. F. van Dorp, Samantha G. Rosenberg, D. H. Fairbrother, Justin M. Gorham, Cornelis W. Hagen, J. D. Wnuk

Publikováno v: Surface Science, 605(3-4), 257-266. ELSEVIER SCIENCE BV
Delft University of Technology

Electron beam induced deposition (EBID) is a direct-write lithographic technique that utilizes the dissociation of volatile precursors by a focused electron beam in a low vacuum environment to create nanostructures. Notable advantages of EBID over co

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e6bb54fe5d221c4fff4661c4f07ef760
https://research.rug.nl/en/publications/fff607ef-c3fe-4204-b16a-378a0fbc544b

The Co/Si(111) interface formation: a temperature dependent reaction

Autor: Paola Luches, Alberto Rota, I. I. Pronin, D. A. Valdaitsev, Nadir S. Faradzhev, M. V. Gomoyunova, Sergio Valeri

Publikováno v: Surface science 511 (2002): 303–311. doi:10.1016/S0039-6028(02)01509-1
info:cnr-pdr/source/autori:P. Luches, A. Rota, S. Valeri, I. Pronin, D.A. Valdaitsev, N.S. Faradzhev, M.V. Gomoyunova/titolo:The Co%2FSi(111) interface formation: a temperature dependent reaction/doi:10.1016%2FS0039-6028(02)01509-1/rivista:Surface science/anno:2002/pagina_da:303/pagina_a:311/intervallo_pagine:303–311/volume:511

We have investigated the reaction of Co with the Si(111) surface both at room temperature (RT) and at high temperature (500-650 degreesC). The temperature evolution of the RT deposited 10 ML film has also been studied. The films, prepared by the diff

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::12093610723cd775bbc6714ec163d07c
https://hdl.handle.net/11380/460179

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