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pro vyhledávání: '"Eka Pawinanto, Roer"'
Publikováno v:
Advanced Materials Research. 705:270-274
A Planar square stack coupled inductor coils on silicon substrate has been fabricated using MEMS technology. The fabrication process utilized a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a508f35ecca1195ef506d4bcfe6b82a2
https://doi.org/10.4028/www.scientific.net/amr.705.270
https://doi.org/10.4028/www.scientific.net/amr.705.270
Autor:
Hasanah, Lilik, Mutia, Rahma, Wulandari, Chandra, Mulyanti, Budi, Kudnie Sahari, Siti, Eka Pawinanto, Roer, Hamzah, Azrul Azlan
Publikováno v:
Results in Optics; 20230101, Issue: Preprints