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Publikováno v:
Sensors and Actuators, A: Physical, 134(2), 374-381. Elsevier
Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crysta
Autor:
Ejc Edwin Bos, JE Jan-Eite Bullema, Flm Frank Delbressine, Phj Piet Schellekens, Andreas Dietzel
Publikováno v:
Precision Engineering, 32(2), 100-105. Elsevier
Thornett E., 7th International ConferenceEuropean Society for Precision Engineering and Nanotechnology, EUSPEN 2007, 20 May 2007 through 24 May 2007, 2, 197-200
Scopus-Elsevier
Precision Engineering, 2, 32, 100-105
Thornett E., 7th International ConferenceEuropean Society for Precision Engineering and Nanotechnology, EUSPEN 2007, 20 May 2007 through 24 May 2007, 2, 197-200
Scopus-Elsevier
Precision Engineering, 2, 32, 100-105
Assembly is a crucial part in the realization of a product. Compared to assembly in the macro world, assembly in the micro world is influenced by scaling effects. These include surface forces, high requirements on placement uncertainty and small prod
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c61a36f22c150b85fb70e9ae2d98c03d
https://research.tue.nl/nl/publications/bfc31e7d-9b0b-4935-bd74-96accb4a072e
https://research.tue.nl/nl/publications/bfc31e7d-9b0b-4935-bd74-96accb4a072e