Zobrazeno 1 - 2
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pro vyhledávání: '"Edward O. Haeggstrom"'
Autor:
Yongli Huang, Xuefeng Zhuang, Edward O. Haeggstrom, A. Sanli Ergun, Ching-Hsiang Cheng, Butrus T. Khuri-Yakub
Publikováno v:
Ultrasonics. 48:74-81
In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltag
Publikováno v:
Measurement Science & Technology; Oct2011, Vol. 22 Issue 10, p105704-105704, 1p