Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Edward Kornegay"'
Publikováno v:
SPIE Proceedings.
Accurate overlay measurements rely on robust, repeatable, and accurate feature position determination. In our effort to develop traceable overlay standards we have examined a number of edge detection methods and the parameters which affect those meas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec30499a18c4cd7faac00b391de2e4eb
https://doi.org/10.1117/12.436777
https://doi.org/10.1117/12.436777
Autor:
Theodore D. Doiron, Stephen H. Fox, Richard M. Silver, William B. Penzes, Stephen C. Rathjen, David T. Owens, Edward Kornegay, Michael T. Takac
Publikováno v:
SPIE Proceedings.
In this paper we describe our design and the manufacturing of a 2D grid artifact of chrome on quartz on a 150 mm X 150 mm X 6.35 mm plate. The design has been agreed upon by a number of Semiconductor Equipment Manufacturers International participants
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3be4bc5f15305fd44c260532cacb58ee
https://doi.org/10.1117/12.350799
https://doi.org/10.1117/12.350799
Publikováno v:
Scopus-Elsevier
We present results of investigations into optical focus and edge detection algorithms relevant to overlay metrology. We compare gradient energy, standard deviation, contrast and summed intensity of acquired images as focus metrics for bright-field, s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::adbb21e225c385f84944e5e7280d297d
https://doi.org/10.1117/12.350794
https://doi.org/10.1117/12.350794