Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Edward D. Moore"'
Autor:
Viktor Samu, Ferenc Korsos, Edward D. Moore, J. Byrnes, Bálint Fodor, Leonard M. Rubin, Zoltan Kiss, Janos Szivos, Zsolt Zolnai, Anita Pongracz
Publikováno v:
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In this study we investigate the effect of dose rate on defect formation due to high-dose, low-energy arsenic and boron implantation into n-type and p-type Si (100) samples. Besides room temperature (RT) micro-photoluminescence imaging (μ-PL) variou
Autor:
Zs. Zolnai, Janos Szivos, J. Byrnes, O. Sepsi, F. Ujhelyi, Leonard M. Rubin, a. Kun, Anita Pongracz, Edward D. Moore, Gy. Nadudvari
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Photo-modulated reflectance measurements provide a powerful, non-contact, non-destructive and inline-compatible method with low-cost operation for statistical process control of ion implantation steps on monitor and on product wafers. We present case