Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Edward Chiu"'
Publikováno v:
Advanced Science Letters. 8:332-336
Publikováno v:
ETRI Journal. 29:817-819
A low-stress organic polymer membrane is proposed as a deformable mirror that can be incorporated into a cellular phone camera to achieve auto focusing without motor-type moving parts. It is demonstrated that our fabricated device has an optical powe
Publikováno v:
International Journal of Nonlinear Sciences and Numerical Simulation. 3
Publikováno v:
Microelectromechanical Systems.
A compact MEMS flowmeter was fabricated and tested for small gas flow rates from 0.5 to 10 sccm. The flowmeter was fabricated by integrating a silicon chip consisting of three surface-micromachined sensor clusters with a 60μm tall, 1.25 mm wide, and