Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Edmund Schuengel"'
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as well as the possibilities of the independent control of the ion f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8466024c3c33f0b2ba4630cfcf147a67
http://arxiv.org/abs/1809.06779
http://arxiv.org/abs/1809.06779
Autor:
Manaswi Daksha, Birk Berger, Julian Schulze, Aranka Derzsi, Ihor Korolov, Edmund Schuengel, Mark Koepke, Zoltan Donko
Publikováno v:
2016 IEEE International Conference on Plasma Science (ICOPS).
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (γ-CAST) in capacitively coupled radio-frequency plasmas is proposed. This non-intrusive, sensitive diagnostic is based on a combination of Phase
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59aa6b5779e45285b26963d9cf569ad9
https://doi.org/10.1109/plasma.2016.7534337
https://doi.org/10.1109/plasma.2016.7534337
Autor:
Timo Gans, Julian Schulze, Jean-Paul Booth, Thomas Mussenbrock, Steven Brandt, Birk Berger, J.B. Franek, Edmund Schuengel, Erik Johnson, Ihor Korolov, Zoltan Donko, Mark Koepke, Trevor Lafleur, Bastien Bruneau, Aranka Derzsi, Deborah O'Connell
Publikováno v:
2016 IEEE International Conference on Plasma Science (ICOPS).
The spatio-temporal electron impact excitation dynamics in a capacitively coupled RF discharge driven by tailored voltage waveforms in Ar and CF4 are investigated experimentally and by PIC simulations. In the experiment, the discharge is driven by up
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1c7028ecfc98bc889d6cad2da6d2c01
https://doi.org/10.1109/plasma.2016.7534353
https://doi.org/10.1109/plasma.2016.7534353
Autor:
Mark Koepke, Zoltan Donko, Aranka Derzsi, Manaswi Daksha, Julian Schulze, Edmund Schuengel, Birk Berger, Ihor Korolov
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients ($\gamma$-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This non-intrusive, sensitive diagnostic is based on a combination of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6d6df56ec38937fced16c30f3cf17fc2
http://arxiv.org/abs/1604.02868
http://arxiv.org/abs/1604.02868
Autor:
Ralf Peter Brinkmann, Jan Trieschmann, Ihor Korolov, Julian Schulze, Sebastian Wilczek, Zoltan Donko, Edmund Schuengel, Aranka Derzsi, Thomas Mussenbrock
Publikováno v:
2015 IEEE International Conference on Plasma Sciences (ICOPS).
In capacitively coupled radio frequency (CCRF) discharges at low pressures the electron heating is dominated by electron interaction with the plasma sheath. Especially the beams of the highly energetic electrons (of which the energy is much higher th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a3622be6eebde3f634de72d88809f7a3
https://doi.org/10.1109/plasma.2015.7179545
https://doi.org/10.1109/plasma.2015.7179545
Autor:
Aranka Derzsi, Ralf Peter Brinkmann, Ihor Korolov, Zoltan Donko, Julian Schulze, Jan Trieschmann, Sebastian Wilczek, Edmund Schuengel, Thomas Mussenbrock
The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d5ea3608bdb153d7414efb04927afda1
http://arxiv.org/abs/1410.5327
http://arxiv.org/abs/1410.5327
Publikováno v:
2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS).
In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE) [1]. Recently
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b67addae69e9d8f7f4668a494d2d39a9
https://doi.org/10.1109/plasma.2014.7012420
https://doi.org/10.1109/plasma.2014.7012420
Publikováno v:
2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS).
The effect of structured (non-planar) electrode topologies, e.g. rectangular, rounded, and triangular trenches, on the electron heating dynamics and ion density profile in capacitive radio frequency plasmas is investigated experimentally and by an an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::494c0a63f73c061b0c301b18e8c97ef5
https://doi.org/10.1109/plasma.2014.7012149
https://doi.org/10.1109/plasma.2014.7012149
Autor:
Denis Eremin, Edmund Schuengel, Ralf Peter Brinkmann, Peter Hartmann, Aranka Derzsi, Jan Trieschmann, Ihor Korolov, Thomas Mussenbrock, Zoltan Donko, Julian Schulze, Sebastian Wilczek
Publikováno v:
Physics of Plasmas. 23:063514
Low pressure capacitive radio frequency (RF) plasmas are often described by equivalent circuit models based on fluid approaches that predict the self-excitation of resonances, e.g., high frequency oscillations of the total current in asymmetric disch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e7428e5e735c54a666e58e62822bd89d
https://doi.org/10.1063/1.4953432
https://doi.org/10.1063/1.4953432
Publikováno v:
Physics of Plasmas. 23:033510
Spatial structures of the electron density and temperature in ring-shaped hollow cathode capacitive rf plasma with a single narrow trench of 2 mm width have been investigated at various trench depths of D = 5, 8, 10, 12, and 15 mm. It is found that t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7998287dbedd8180892e4a7d07beb57d
https://doi.org/10.1063/1.4943964
https://doi.org/10.1063/1.4943964