Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Eddie D. Pylant"'
Publikováno v:
The Handbook of Surface Imaging and Visualization ISBN: 9780367811815
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13c0d2d75bedfc97ae749cd84594ad5f
https://doi.org/10.1201/9780367811815-59
https://doi.org/10.1201/9780367811815-59
Autor:
J. M. White, János Kiss, X.-L. Zhou, Laura A. Pressley, Miguel Castro, Eddie D. Pylant, Sam K. Jo
Publikováno v:
The Journal of Physical Chemistry. 97:8476-8484
To enhance our understanding of the thermal interactions of fluorocarbons with transition-metal surfaces, CF 3 I was adsorbed on clean and iodine-precovered Ag(111) and studied by temperature-programmed desorption (TPD), X-ray photoelectron spectrosc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6025214aa9649c6f21092e5cbc116d64
https://doi.org/10.1021/j100134a017
https://doi.org/10.1021/j100134a017
Publikováno v:
MRS Proceedings. 318
Chemical/native oxides grown on Si(100) after several standard wet cleans are characterized by Angle-resolved X-ray Photoelectron Spectroscopy (ARXPS), and Auger Electron Spectroscopy using sputter depth profiles. Target Factor Analysis (TFA) was use
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b162ccf6cc69aebba4c9f9692ee665bc
https://doi.org/10.1557/proc-318-99
https://doi.org/10.1557/proc-318-99
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 12:1394
Auger depth profiles are used to compare sputtered Ti, reactively sputtered TiN, and TiN/Ti bilayer films in submicron (0.8 and 0.4 μm) contact/via holes, deposited with and without a collimator. Samples were cleaved and mounted to minimize difficul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6df334e63efefef9ccee233e76d7a887
https://doi.org/10.1116/1.587305
https://doi.org/10.1116/1.587305
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