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pro vyhledávání: '"Edda Sommer"'
Autor:
Christian Rettig, Dayo Oshinubi, Karl-Franz Reinhart, Tjalf Pirk, Edda Sommer, Ingo Herrmann, Mirko Hattass
Publikováno v:
Advanced Microsystems for Automotive Applications 2011 ISBN: 9783642213809
In the EU FP7 project "ADOSE" a new approach has been used to develop a new cost efficient technology by adapting a volume proven integrated MEMS process for the production of a suspended thermodiode array. As low-cost was to be the key feature of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59e26d8bb0e012d39474978155588e3a
https://doi.org/10.1007/978-3-642-21381-6_9
https://doi.org/10.1007/978-3-642-21381-6_9
Autor:
Ingo Herrmann, Martin Eckardt, F. Freund, Dayo Oshinubi, Edda Sommer, Volker Krüger, U. Kunz, Ando Feyh, K.-F. Reinhart, Tjalf Pirk
Publikováno v:
Procedia Engineering
A new low-cost process for mid resolution FIR-Arrays for thermal imaging in the LWIR range (8- 14 μm) has been developed. Integrated array devices with 1k and 5k pixel array size have been designed and manufactured using this process which is fully