Zobrazeno 1 - 10
of 173
pro vyhledávání: '"Eberhard Manske"'
Autor:
Jaqueline Stauffenberg, Michael Reibe, Anja Krötschl, Christoph Reuter, Ingo Ortlepp, Denis Dontsov, Steffen Hesse, Ivo W. Rangelow, Steffen Strehle, Eberhard Manske
Publikováno v:
Micro and Nano Engineering, Vol 19, Iss , Pp 100201- (2023)
In this paper, the combination of an advanced nanopositioning technique and a tip-based system, which can be used as an atomic force microscope (AFM) and especially for field emission scanning probe lithography (FESPL) is presented. This is possible
Externí odkaz:
https://doaj.org/article/694ac5c75e5041bc82d46645cd033f5f
Autor:
Ulrike Blumröder, Paul Köchert, Thomas Fröhlich, Thomas Kissinger, Ingo Ortlepp, Jens Flügge, Harald Bosse, Eberhard Manske
Publikováno v:
Sensors, Vol 23, Iss 3, p 1734 (2023)
Since the turn of the millennium, the development and commercial availability of optical frequency combs has led to a steadily increase of worldwide installed frequency combs and a growing interest in using them for industrial-related metrology appli
Externí odkaz:
https://doaj.org/article/24bd644bc07a4f0290a77bb6eaa447f9
Autor:
Jaqueline Stauffenberg, Ingo Ortlepp, Johannes Belkner, Denis Dontsov, Enrico Langlotz, Steffen Hesse, Ivo Rangelow, Eberhard Manske
Publikováno v:
Applied Sciences, Vol 12, Iss 15, p 7843 (2022)
This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision,
Externí odkaz:
https://doaj.org/article/3a99003d965c4565a9acc24ad6e44010
Autor:
Dong Wook Shin, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Eberhard Manske, Wei Gao
Publikováno v:
Applied Sciences, Vol 11, Iss 17, p 8028 (2021)
Major modifications are made to the setup and signal processing of the method of in-situ measurement of the pitch of a diffraction grating based on the angles of diffraction of the diffracted optical frequency comb laser emanated from the grating. In
Externí odkaz:
https://doaj.org/article/65ec86889b664bdfaa70db7c584f6b2c
Publikováno v:
Sensors, Vol 21, Iss 17, p 5862 (2021)
This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the
Externí odkaz:
https://doaj.org/article/363c54b89cd5475a9523956c3779beba
Publikováno v:
Micromachines, Vol 12, Iss 4, p 357 (2021)
The actual technical implementation of conventional interferometers is quite complex and requires manual manufacturing. In combination with the required construction space defined by the optical setup, their applications are limited to selected measu
Externí odkaz:
https://doaj.org/article/941dcb8a406b4726b4304074fa8b73f1
Publikováno v:
Proceedings, Vol 56, Iss 1, p 12 (2020)
Standing wave interferometers (SWIs) show enormous potential for miniaturization because of their simple linear optical set-up, consisting only of a laser source, a measuring mirror and two standing wave sensors for obtaining quadrature signals. To r
Externí odkaz:
https://doaj.org/article/428f094aa88f4be987e4fb39e5de3029
Autor:
Jaqueline Stauffenberg, Ingo Ortlepp, Christoph Reuter, Mathias Holz, Denis Dontsov, Christoph Schäffel, Steffen Strehle, Jens-Peter Zöllner, Ivo W. Rangelow, Eberhard Manske
Publikováno v:
Proceedings, Vol 56, Iss 1, p 34 (2020)
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used
Externí odkaz:
https://doaj.org/article/59008b57b89d43e6af819dbff85d0a4e
Publikováno v:
Sensors, Vol 20, Iss 9, p 2462 (2020)
The quality of processed workpieces is affected directly by the precision of the linear stage. Therefore, the linear displacement calibration of machine tools must be implemented before delivery and after employment for a period of time. How to perfo
Externí odkaz:
https://doaj.org/article/04a3c33430b242e293a52deaf95d6f0b
Publikováno v:
International Journal of Automation and Smart Technology, Vol 4, Iss 3, Pp 163-167 (2014)
A proposed optomechatronic module is intended for the automatic and efficient calibration procedure of compact autocollimators utilized for high precision angle measurement. Conventional autocollimators have the disadvantages, e.g. the large volume a
Externí odkaz:
https://doaj.org/article/687185bebbbf4faa86f5b2c7810b744d