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of 37
pro vyhledávání: '"Eberhard F. Krimmel"'
This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N. This volume, 3 4'Silicon'Supplement Volume B Sc, is devoted to applications of silico
Publikováno v:
Si Silicon ISBN: 9783662099032
One of the crucial components in FET-based ICs is the thin dielectric layer which insulates the active portion of the device from the gate. Suitable silicon nitride layers are formed by thermal nitridation of Si, which due to the diffusion barrier ef
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https://explore.openaire.eu/search/publication?articleId=doi_________::4197a6180c00d59e0ba57d20b06fff3a
https://doi.org/10.1007/978-3-662-09901-8_18
https://doi.org/10.1007/978-3-662-09901-8_18
Publikováno v:
Si Silicon ISBN: 9783662099032
Silicon nitride is applied in integrated optics, for example, in coupling active and passive optical components, such as monolithically integrated devices, which convert electric signals into photons, and complementary ones, which convert photons int
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https://doi.org/10.1007/978-3-662-09901-8_26
https://doi.org/10.1007/978-3-662-09901-8_26
Publikováno v:
Si Silicon ISBN: 9783662099032
Semiconductor devices have to be stable and long-lasting. Electronically active parts of such devices are often thin surface layers with a thickness as low as 20 nm. p-n junctions that emerge at the surface are sensitive to mechanical damage, moistur
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https://doi.org/10.1007/978-3-662-09901-8_6
https://doi.org/10.1007/978-3-662-09901-8_6
Publikováno v:
Si Silicon ISBN: 9783662099032
There are two types of masks for manufacturing device structures by lithographic methods on substrates.
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https://doi.org/10.1007/978-3-662-09901-8_3
https://doi.org/10.1007/978-3-662-09901-8_3
Publikováno v:
Si Silicon ISBN: 9783662099032
Silicon nitride is applied in monolithic, integrated, digital, and analog circuits composed of FETs, diodes, resistors, and thin-film capacitors on compound semiconductor substrates. Silicon nitride can be used as a mask for implanting Si to produce
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https://doi.org/10.1007/978-3-662-09901-8_25
https://doi.org/10.1007/978-3-662-09901-8_25
Publikováno v:
Si Silicon ISBN: 9783662099032
The read-only memories (ROMs) are ICs where stored information is expected not to be changed during operation. Such memories have breakdown voltages much higher than the normal operating voltages. This offers the possibility to program finished ROMs
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https://doi.org/10.1007/978-3-662-09901-8_21
https://doi.org/10.1007/978-3-662-09901-8_21
Publikováno v:
Si Silicon ISBN: 9783662099032
Semiconductor devices, which utilize the interaction between photons and semiconductors, are applied as photosensors for various ranges of photon energy, photovoltaic cells, sensors in electrophotography, image sensors, etc. For CCD devices cf. Chapt
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https://doi.org/10.1007/978-3-662-09901-8_24
https://doi.org/10.1007/978-3-662-09901-8_24
Publikováno v:
Si Silicon ISBN: 9783662099032
General. Patterned silicon nitride layers are used as masks for growing epitaxial compound semiconductor layers, as masks for doping by diffusion or ion implantation, and as protective dielectric layers in fabricating LEDs.
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https://doi.org/10.1007/978-3-662-09901-8_23
https://doi.org/10.1007/978-3-662-09901-8_23
Publikováno v:
Si Silicon ISBN: 9783662099032
Externí odkaz:
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https://doi.org/10.1007/978-3-662-09901-8_15
https://doi.org/10.1007/978-3-662-09901-8_15