Zobrazeno 1 - 3
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pro vyhledávání: '"Eberhard F Dr Krimmel"'
Autor:
Eberhard F Dr Krimmel
Publikováno v:
Physik in unserer Zeit. 11:22-30
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa64a915d5c352938c023ab252bbff22
https://doi.org/10.1002/piuz.19800110107
https://doi.org/10.1002/piuz.19800110107
Publikováno v:
Le Journal de Physique Colloques. 41:C4-47
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96eaa32d1fef23d23e6b1dded7f3d564
https://doi.org/10.1051/jphyscol:1980408
https://doi.org/10.1051/jphyscol:1980408
Publikováno v:
Nuclear Instruments and Methods. 107:251-252
A method to reduce the time to change dopants in ion implantation systems is described. The source is fed by a suitable mixture of dopant compounds and the desired dopant is selected by mass separation. The down time thus reduces to less than one min
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e813316b77762cdcffb2db7b4fef17e
https://doi.org/10.1016/0029-554x(73)90237-1
https://doi.org/10.1016/0029-554x(73)90237-1