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pro vyhledávání: '"Earle M. Sparks"'
Publikováno v:
Journal of Microelectromechanical Systems. 23:356-363
The response of silicon-based MEMS diaphragms to applied pressure was studied to determine their ability to effectively measure the extent of blast overpressure. Different pressures (0-100 psi) were applied to silicon diaphragms of different diameter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::531f7673f733f8e10c6f7f45d9e0ed48
https://doi.org/10.1109/jmems.2013.2279503
https://doi.org/10.1109/jmems.2013.2279503
