Gap-closing test structures for temperature budget determination

Autor: Jurriaan Schmitz, R.A.M. Wolters, Erik Jouwert Faber

Publikováno v: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 165-169
STARTPAGE=165;ENDPAGE=169;TITLE=24th International Conference on Microelectronic Test Structures, ICMTS 2011

We present the extension of a method for determining the temperature budget of the process side of silicon substrates and chips, employing silicide formation reactions. In this work, silicon-on-insulator type substrates are used instead of bulk silic

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5ae84a2fec69483148baab71aeb3d7e7
https://doi.org/10.1109/icmts.2011.5976840