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Autor:
Legtenberg, R., Legtenberg, Rob, Berenschot, Johan W., Elwenspoek, Michael Curt, Fluitman, J.H.J.
Publikováno v:
Journal of microelectromechanical systems, 6(3), 234-241. IEEE
A surface micromachining process is presented which has been used to fabricate electrostatic microactuators. These microactuators are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear lin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b689d2594770128a24fed66ad0fc85c6
https://doi.org/10.1109/84.623112
https://doi.org/10.1109/84.623112
