Výsledky vyhledávání - "ERP 3D Nanomanufacturing Instruments"

Simulation of Near-Field Optical Inspection with a Solid Immersion Lens

Publikováno v: SID Semicon Innovation Day, Science Centre Delft, 21 May 2019

TNO is currently performing a theoretical assessment of an optical system based on a Solid Immersion Lens (SIL). This contribution presents the theoretical approach and the modelling framework developed for this study.

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Nano-precision multi-agent Maglev positioning platform

This project is aiming to realize miniature self-contained carriers that can independently perform positioning and scanning tasks on nano-scale. Such carriers can support agents for performing tasks such as inspection, deposition, repair, and cleanin

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Monitoring the bio nanomechanical properties of cell structures

Organ-on-chip technology is based on tissues or (stem)cell derived organ mimicking structures and in microfluidic systems. This technology is used to monitor functional response to stimuli, aiming to enable personalized medicine and to conduct pre-cl

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VIRUSCAN: identification and characterization of viruses from their nano-mechanical properties

Measuring the nano-mechanical properties of viruses opens a new route to identify viruses and to assess their infectiveness. Current targeted techniques, like PCR, are only suitable for confirmation and have a high false positive rate due to cross co

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Subsurface Ultrasonic Resonant Force Microscopy for Image-based Overlay Measurement

Autor: Tamer, M.S., Es, M.H. van, Sadeghian Marnani, H., Lans, M.J. van der

Publikováno v: SID Semicon Innovation Day, Science Centre Delft, 21 May 2019

Scanning Probe Microscopy (SPM) has emerged as a metrology solution for the semiconductor industry enabling high throughput defect review and high resolution 3D metrology. TNO has developed a Subsurface Ultrasonic Resonant Force Microscopy (SSURFM) f

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Sub-surface Imaging with Photo Thermal Actuation

In the semiconductor industry, the need for characterization of subsurface features of wafers on a sub-nanometer level becomes ever more important. With Scanning Subsurface Probe Microscopy (SSPM), the smallest features can be measured with high reso

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Optical metasurfaces based spectro-polarimeter

Autor: Stoevelaar, L.P., Gerini, G.

Publikováno v: SID Semicon Innovation Day, Science Centre Delft, 21 May 2019

This contribution presents the design and performance assessment of a metasurface based spectro-polarimeter concept.

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Deep learning for nano-sized particle detection: initial feasibility check

One of the main challenges in detecting a nano-sized particle on a ‘rough’ surface is to differentiate the particle from speckle that is caused by the substrate. The ‘traditional’ approach in particle detection is to record multiple images un

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Electrostatically actuated probes for Scanning Subsurface Ultrasonic Resonance Frequency Microscopy

Autor: Es, M.H. van, Riel, M.C.J.M. van, Duivenvoorde, T., Sadeghian Marnani, H.

Publikováno v: SID Semicon Innovation Day, Science Centre Delft, 21 May 2019

Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on high frequency ultrasound in combination with Atomic Force Microscopy to detect viscoelastic properties of buried materials with high spatial resolution. The key ingredient is a very

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