An atomic hydrogen etching sensor for H2 plasma diagnostics

Autor: J Job Beckers, C. A. de Meijere, EA Osorio, Vadim Yevgenyevich Banine, D. P. J. van Leuken, R. M. van der Horst

Publikováno v: Review of Scientific Instruments, 92(6):063518. American Institute of Physics

A simple and selective new technique for atomic hydrogen flux measurements in a hydrogen plasma environment is introduced and demonstrated in this work. This technique works by measuring the etching rate of an amorphous carbon film and translating th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::04434123ad05baff83bbe37943b2ef70
http://www.scopus.com/inward/record.url?scp=85108090977&partnerID=8YFLogxK

Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon

Autor: EA Osorio, R. M. van der Horst, Vadim Yevgenyevich Banine, J Job Beckers

Publikováno v: Journal of Physics D: Applied Physics, 48(28), 285203-1/9. Institute of Physics

The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to characterize these

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b900f7c8efc490f09363c00b84e20e7e
https://doi.org/10.1088/0022-3727/48/28/285203

Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Autor: EA Osorio, Konstantin N Koshelev, R. M. van der Horst, Wim Goedheer, J Job Beckers, Vladimir Ivanov, Dmitry Lopaev, V.M. Krivtsum, Vadim Yevgenyevich Banine, Frederik Bijkerk, Dmitry Astakhov, Christopher James Lee

Publikováno v: Journal of Physics D: Applied Physics, 49, 145203
Journal of Physics D: Applied Physics, 49(14):145203, 1-9. Institute of Physics
Journal of physics D: applied physics, 49(14):145203. IOP Publishing Ltd.

Plasmas induced by EUV radiation are unique since they are created without the need of any discharge. Moreover, it is essential to characterize these plasmas to understand and predict their long term impact on highly delicate optics in EUV lithograph

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b8ca2436b7d76f66988a6d34754b3b9e
https://doi.org/10.1088/0022-3727/49/14/145203

Dynamics of the spatial electron density distribution of EUV-induced plasmas

Autor: EA Osorio, van der Rm Ruud Horst, J Job Beckers, Vadim Yevgenyevich Banine

Publikováno v: Journal of Physics D: Applied Physics, 48(43):432001. Institute of Physics

We studied the temporal evolution of the electron density distribution in a low pressure pulsed plasma induced by high energy extreme ultraviolet (EUV) photons using microwave cavity resonance spectroscopy (MCRS). In principle, MCRS only provides spa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3cd7c5c2e6ba440ee902c529523dc716
https://doi.org/10.1088/0022-3727/48/43/432001

Chemical Composition, Antioxidant Properties, and Antibacterial Activity of Essential Oils of Satureja macrostema (Moc. and Sessé ex Benth.) Briq.

Autor: Barrientos Ramírez L; Department of Wood, Cellulose and Paper, University of Guadalajara, CUCEI, Road Ing. Ramón Padilla Sánchez 2100, Las Agujas, Zapopan 45200, Jalisco, Mexico., Silva Guzmán JA; Department of Wood, Cellulose and Paper, University of Guadalajara, CUCEI, Road Ing. Ramón Padilla Sánchez 2100, Las Agujas, Zapopan 45200, Jalisco, Mexico., Osorio Muñoz EA; Group of Research and Development in Science Applied to Biological Resources, Salesian Polytechnic University, 12 de Octubre Avenue N2422 and Wilson, Quito 170109, Ecuador., Alvarez Moya C; Environmental Mutagenesis Laboratory, Cellular and Molecular Department, University of Guadalajara, Guadalajara 45200, Jalisco, Mexico., Reynoso Silva M; Environmental Mutagenesis Laboratory, Cellular and Molecular Department, University of Guadalajara, Guadalajara 45200, Jalisco, Mexico., Cetina Corona AF; Department of Wood, Cellulose and Paper, University of Guadalajara, CUCEI, Road Ing. Ramón Padilla Sánchez 2100, Las Agujas, Zapopan 45200, Jalisco, Mexico., Casas Solis J; Microbiology Laboratory, Cellular and Molecular Department, University Center for Biological and Agricultural Sciences (CUCBA), Road Ing. Ramón Padilla Sánchez 2100, Nextipac, Zapopan 45200, Jalisco, Mexico., Vargas Radillo JJ; Department of Wood, Cellulose and Paper, University of Guadalajara, CUCEI, Road Ing. Ramón Padilla Sánchez 2100, Las Agujas, Zapopan 45200, Jalisco, Mexico.

Publikováno v: Molecules (Basel, Switzerland) [Molecules] 2023 Jun 12; Vol. 28 (12). Date of Electronic Publication: 2023 Jun 12.