Zobrazeno 1 - 10
of 141
pro vyhledávání: '"E.G. Lovell"'
Publikováno v:
Technical Digest IEEE Solid-State Sensor and Actuator Workshop.
Deep X-ray lithography and metal plating when coupled with a sacrificial layer, SLIGA, lends itself to the fabrication of very high aspect ratio metal structures which are mechanically stiff in the substrate direction and can be very flexible in the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76b52606774ec231bb09cdf8df7edf75
https://doi.org/10.1109/solsen.1992.228273
https://doi.org/10.1109/solsen.1992.228273
Publikováno v:
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
Mechanical analysis and design of an improved class of differential pressure transducers is presented. Double-sided overload protection for a planar transducer is achieved with three-dimensional stops, produced with a process involving X-ray lithogra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::746b64c39e7f7c937d655d1b63fe9bc3
https://doi.org/10.1109/sensor.1991.148894
https://doi.org/10.1109/sensor.1991.148894
Publikováno v:
[1991] Proceedings. IEEE Micro Electro Mechanical Systems.
A variant of deep X-ray lithography, the LIGA process, is described. The fundamental processing sequence has been augmented with a locally defined sacrificial polyimide layer. This requires alignment of the X-ray mask to the optically defined sacrifi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78a0ccf275d914872d3b14f63c841a6b
https://doi.org/10.1109/memsys.1991.114772
https://doi.org/10.1109/memsys.1991.114772
Publikováno v:
International Technical Digest on Electron Devices.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a63dbf056e0dd92261e13685797e2256
https://doi.org/10.1109/iedm.1990.237124
https://doi.org/10.1109/iedm.1990.237124
Autor:
Denice D. Denton, Kenneth Skrobis, T.W. Chapman, E.G. Lovell, Bumkyoo Choi, S.S. Bajikar, Todd R. Christenson, J.W. Lee, Henry Guckel
Publikováno v:
IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
A bilevel photoresist system which uses optical processing only is presented. The photoresist for this work is poly(methyl methacrylate) or PMMA. It is sensitive to X-ray photons and deep ultraviolet radiation. It can be used for spin coating or can
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::938691a3c295d57f22a90592d7f70ef2
https://doi.org/10.1109/solsen.1990.109834
https://doi.org/10.1109/solsen.1990.109834
Publikováno v:
Journal of the American College of Cardiology. 31:462
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d223577478e42212a2d885d2fc460b51
https://doi.org/10.1016/s0735-1097(98)80362-8
https://doi.org/10.1016/s0735-1097(98)80362-8
Autor:
E.G. Lovell, H. Ray
Publikováno v:
Nuclear Engineering and Design. 61:237-243
The stability of the motion of thin elastic isotropic circular cylindrical shells subjected to suddenly developed temperatures is investigated. The excitation of particular unstable modes is identified from an evaluation of parameters in the equation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ed7a458a2282cea557050aa78795639
https://doi.org/10.1016/0029-5493(80)90051-5
https://doi.org/10.1016/0029-5493(80)90051-5
Autor:
M. Hejazi, E.G. Lovell
Publikováno v:
Nuclear Engineering and Design. 60:281-285
A closed-form solution is developed for stress waves in a solid resulting from volumetric energy deposition. The material is linear elastic and the geometry a plate or slab-like component. One dimensional waves perpendicular to the surface are consid
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a10fc82d33922be8923b09bfcd24037e
https://doi.org/10.1016/0029-5493(80)90242-3
https://doi.org/10.1016/0029-5493(80)90242-3
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Akademický článek
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