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pro vyhledávání: '"E. de Chambost"'
Akademický článek
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Publikováno v:
Applied Surface Science. :640-644
A new technique is proposed for the depth profiling of low energy As and P implants. We show that monitoring the monatomic negatively charged ions of As− and P−, using oxygen backfilling (flooding) in combination with low energy Cs+ sputtering, i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ffdf11b5500eb9a10d2f6bbbd2f1cb3
https://doi.org/10.1016/j.apsusc.2004.03.130
https://doi.org/10.1016/j.apsusc.2004.03.130
Publikováno v:
Applied Surface Science. :878-882
Multicollection system allows improvement of measurement reproducibility for isotope ratios on SIMS instruments provided that the other sources of measurement variability are well controlled. This paper presents analytical protocols developed to cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::04bbf24184086e93f3c2dae6a7618c7e
https://doi.org/10.1016/j.apsusc.2004.03.157
https://doi.org/10.1016/j.apsusc.2004.03.157
Publikováno v:
Applied Surface Science. :954-958
The presence of shallow interfaces in the crater bottom surface can lead to the appearance of several reflected beams from different depths that can distort the calibration close to these interfaces. A multi-beam scattering model has been developed.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5b780bd2c1f9831d20a6a8f226e71031
https://doi.org/10.1016/j.apsusc.2004.03.186
https://doi.org/10.1016/j.apsusc.2004.03.186
Publikováno v:
Applied Surface Science. :949-953
SIMS depth profiles for full wafer analyses were carried out on the CAMECA IMS Wf instrument. Experiments have been performed in order to investigate the analytical performance of this SIMS instrument for shallow, medium and deep profiles in terms of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5501a38255fc5e126df272794918137
https://doi.org/10.1016/j.apsusc.2004.03.202
https://doi.org/10.1016/j.apsusc.2004.03.202
Autor:
Chrystel Hombourger, Pierre-Francois Staub, E. de Chambost, M. Schuhmacher, C. Hitzman, F. Desse
Publikováno v:
Applied Surface Science. :383-386
A new technique, the Low energy Electron induced X-ray Emission Spectroscopy (LEXES) is used to determine dose of shallow dopants and film thicknesses; it is element selective and can resolve depth in the nanometer range. CAMECA has developed a speci
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a717fb5137cb87e7801fbb496e6317fd
https://doi.org/10.1016/s0169-4332(02)00680-3
https://doi.org/10.1016/s0169-4332(02)00680-3
Publikováno v:
Applied Surface Science. :391-395
The depth scale calibration of a SIMS depth profile requires to determine the sputter rate used for the analysis from the crater depth measurement. An in situ crater depth measurement system based on the heterodyne laser interferometer has been devel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f4b78fc8279ff3bbc7e8ddf8114cfd3
https://doi.org/10.1016/s0169-4332(02)00685-2
https://doi.org/10.1016/s0169-4332(02)00685-2
Publikováno v:
Fresenius' Journal of Analytical Chemistry. 365:12-18
The recent developments in magnetic sector SIMS are reviewed. It is not aimed at a detailed description of these instruments which, for several of them, can be found elsewhere [1–8] but reviews the driving forces making necessary the development of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2bb8c28ea5d7120b8a1c4c5704902185
https://doi.org/10.1007/s002160051438
https://doi.org/10.1007/s002160051438
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 22:341
The challenge for secondary ion mass spectroscopy is to accurately measure the profile shape for low-energy implants within the first few nanometers as well as to precisely determine the junction depth in the structure after any thermal treatment. Ev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::73a1903825cc5f3f132e5afc2b8db5c2
https://doi.org/10.1116/1.1634957
https://doi.org/10.1116/1.1634957
Publikováno v:
Ferroelectrics. 93:5-11
This work reports preliminary results concerning the application of ferroelectric P(VDF-TrFE) 70/30 to a Programmable Neural Network System. It is focused on the programing of the memory, i.e. on the research of an addressing method inducing the lowe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69de87f07892ecd0d6db28a34456598d
https://doi.org/10.1080/00150198908017314
https://doi.org/10.1080/00150198908017314