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pro vyhledávání: '"E. W. C. Chong"'
Autor:
S. Nishino, Yoshihide Makino, Alex Man Ho Kwan, E. W. C. Chong, Ying-Fei Teh, Fan Zeng, Chunmei Huang, Man Wong, Toshiyuki Tsuchiya, Lei Lu, Osamu Tabata, Sichao Song, Ying-Khai Teh, William Hau, Akira Taniyama, Yan Gao, Xing Lu
Publikováno v:
Journal of Microelectromechanical Systems. 21:586-595
Reported presently are two design approaches to improve the performance of an electrothermal in-plane microactuator with “chevron” beams. One incorporates beams with uniform cross sections but nonuniform lengths or tilt angles to accommodate the