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pro vyhledávání: '"E. O. Pashchenko"'
Autor:
E. O. Pashchenko, D. O. Savchenko, S. V. Skorkhod, R. M. Kurganov, S. An. Klimenko, Yu. Yu. Rumiantseva, S. A. Kukharenko, O. M. Kaidash
Publikováno v:
Journal of Superhard Materials. 45:46-53
Publikováno v:
Journal of Physics: Conference Series. 2045:012005
Single crystal silicon is an important basic material used to manufacture electronic and photovoltaic devices. Ductile mode of diamond wire sawing is a promising method for silicon wafering in order to produce wafers with minimal surface damage. To a