Zobrazeno 1 - 2
of 2
pro vyhledávání: '"E. L. Korenevski"'
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:1165-1169
The results of investigating the microstructure and phase composition of AlN/SiNx multilayer films with alternating nanocrystalline aluminum nitride (nc-AlN) and amorphous silicon nitride (a-SiNx) phases, which were formed via magnetron sputtering, a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09871d640315223fc6a4aabc13a87578
https://doi.org/10.1134/s1027451018050695
https://doi.org/10.1134/s1027451018050695
Autor:
N.T. Kvasov, G. E. Remnev, V.I. Shymanski, E. L. Korenevski, J. O'Connel, Gregory Abadias, Vladimir V. Uglov, S.V. Zlotski, A. van Vuuren
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 435:228-235
The results of microstructure and phase composition of the AlN/SiNx multilayered films after the irradiation with helium and argon ions are presented. The multilayered films with alternating nanocrystalline (nc-AlN) and amorphous (a-SiNx) phases with
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7dc11a89df3afa725bef6ed387e1e3f
https://doi.org/10.1016/j.nimb.2018.01.012
https://doi.org/10.1016/j.nimb.2018.01.012