Zobrazeno 1 - 1
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pro vyhledávání: '"E. J. Hendriske"'
Publikováno v:
Journal of Microelectromechanical Systems. 20:1298-1309
We present the design, fabrication, and testing of a microscale positioning system. The system was designed in the SUMMiT V process to produce in-plane, bidirectional, micrometer-scale linear motion of a shuttle using a ratcheting mechanism and multi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ceccd0fd99b7e25e0ba822234a2ffe56
https://doi.org/10.1109/jmems.2011.2167674
https://doi.org/10.1109/jmems.2011.2167674
