Zobrazeno 1 - 2
of 2
pro vyhledávání: '"E. I. Kantardjeva"'
Publikováno v:
Physica Status Solidi (a). 64:73-80
The oxidation kinetics of Si in oxygen rf plasma in a planar reactor is investigated. It is found that the dependence of the oxide layer thickness on oxidation time is characterized by a rapid initial region described by the Mott-Cabrera law, followe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::734809d42982a8f8947b7783b67e490e
https://doi.org/10.1002/pssa.2210640106
https://doi.org/10.1002/pssa.2210640106
