Zobrazeno 1 - 4
of 4
pro vyhledávání: '"E. F. Voznesencky"'
Publikováno v:
Journal of Physics: Conference Series. 1328:012025
The technique of optical emission spectroscopy (OES) in combination with plasma emission models for determining the parameters of a gas discharge is presented. Measurements of charge carrier concentration and electron temperature in an inductively co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7ae86d47b8ac5931f3621971edec85a4
https://doi.org/10.1088/1742-6596/1328/1/012025
https://doi.org/10.1088/1742-6596/1328/1/012025
Publikováno v:
Journal of Physics: Conference Series. 1328:012026
Experimental measurements of the pressure in the vacuum chamber of the RF plasma unit at various flow rates of the working gas — Argon — have been carried out, and a dynamic vacuum curve has been constructed for the system. A simulation of the fl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54b187aa70464410e9f57c3c5ae3283a
https://doi.org/10.1088/1742-6596/1328/1/012026
https://doi.org/10.1088/1742-6596/1328/1/012026
Publikováno v:
Journal of Physics: Conference Series; 2019, Vol. 1328 Issue 1, p1-1, 1p
Publikováno v:
Journal of Physics: Conference Series; 2019, Vol. 1328 Issue 1, p1-1, 1p