Zobrazeno 1 - 2
of 2
pro vyhledávání: '"E. D. Belyakova"'
Autor:
E. D. Belyakova, N.M. Shmidt, L. S. Berman, R. V. Karzhavin, I.A. Mokina, A. T. Gorelenok, I. N. Karimov, S. V. Belyakov
Publikováno v:
MRS Proceedings. 284
Investigations of plasma grown native oxides on indium phosphide carried out recently [1,2] have shown that these oxides exhibit properties which are promising to be used in MIS structures on InP, due to their stable composition which includes [InxPy
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40faac3218bc97b68c58bf8220b9da0c
https://doi.org/10.1557/proc-284-625
https://doi.org/10.1557/proc-284-625
Autor:
I.A. Mokina, V. M. Mikoushkin, I. N. Karimov, S. V. Belyakov, E. D. Belyakova, S. E. Sysoev, N.M. Shmidt, A. T. Gorelenok, L. S. Berman, R. V. Karzhavin
Publikováno v:
MRS Proceedings. 284
Ellipsometry and XPS investigations of RF plasma grown native oxide and C-V measurements of its interface were performed.Strong dependence of the composition of the plasma grown native oxides and electric properties of MIS structures on the time of p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b8b0ad235945132cf8f9fe927d4b3ef
https://doi.org/10.1557/proc-284-619
https://doi.org/10.1557/proc-284-619