Zobrazeno 1 - 10
of 10
pro vyhledávání: '"E. A. Kralkina"'
Publikováno v:
AIP Advances, Vol 8, Iss 3, Pp 035217-035217-29 (2018)
Present paper is aimed to reveal experimentally and theoretically the influence of magnetic field strength, antenna shape, pressure, operating frequency and geometrical size of plasma sources on the ability of plasma to absorb the RF power characteri
Externí odkaz:
https://doaj.org/article/a59769b1412643cbb5a409eb51c22520
Publikováno v:
Plasma Physics Reports. 48:1189-1198
Publikováno v:
Plasma Physics Reports. 48:961-972
Publikováno v:
Journal of Physics: Conference Series. 2379:012018
Experimental study of the rates of plasma-chemical deposition of diamond-like coatings in toluene vapour in capacitive RF discharge was carried out. It is shown that in the RF power range of 100-300 W, the deposition rate is mainly affected by the to
Publikováno v:
Review of Scientific Instruments. 67:4114-4116
We developed and evaluated a new partially ionized beam (PIB) source to deposit high quality Cu films. The novelty of the PIB source lies in the fact that the crucible and ionization parts are spaced in one cylindrical shell to make its structure com
Publikováno v:
Journal of Russian Laser Research; Jul2003, Vol. 24 Issue 4, p301-321, 21p
Publikováno v:
Le Journal de Physique Colloques. 40:C7-231
Publikováno v:
Plasma Sources Science & Technology; 5/1/2017, Vol. 26 Issue 5, p1-1, 1p
Autor:
E A Kralkina, A A Rukhadze, V B Pavlov, K V Vavilin, P A Nekliudova, A K Petrov, A F Alexandrov
Publikováno v:
Plasma Sources Science & Technology; Feb2016, Vol. 25 Issue 1, p1-1, 1p
Autor:
K V Vavilin, E A Kralkina, P A Nekludova, A. K Petrov, A M Nikonov, V B Pavlov, A A Airapetov, V V Odinokov, G Ya Pavlov, V A Sologub
Publikováno v:
Journal of Physics: Conference Series; 2016, Vol. 669 Issue 1, p1-1, 1p