Zobrazeno 1 - 6
of 6
pro vyhledávání: '"E Yu Shemakhin"'
Publikováno v:
Journal of Engineering Physics and Thermophysics. 94:1336-1343
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::929a21d08a90af24d685d09f96192e70
https://doi.org/10.1007/s10891-021-02415-5
https://doi.org/10.1007/s10891-021-02415-5
Publikováno v:
Journal of Physics: Conference Series. 2388:012050
A new approach for modeling steady state inductively coupled radio frequency discharges at low pressure is described. A simple one-dimensional model is considered, which includes Maxwell’s equations and the electron balance equation with boundary c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2fd10ac7b0e4fb21ca0097734de2e356
https://doi.org/10.1088/1742-6596/2388/1/012050
https://doi.org/10.1088/1742-6596/2388/1/012050
Autor:
Yu A Shemakhin, E S Samsonova, E F Voznesenskiy, Y O Zhelonkin, E Yu Shemakhin, S A Fadeev, T N Terentev, R A Maksimov, V A Tyurin
Publikováno v:
Journal of Physics: Conference Series. 2270:012007
In this work, we carried out comparative studies of the electron temperature in Inductive coupled radio frequency (ICRF) for two configurations of discharge chambers – cylindrical and flat, considered as prototypes of ICP technological modules of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f13616dcbb99e0f1920a3fb5501d09b
https://doi.org/10.1088/1742-6596/2270/1/012007
https://doi.org/10.1088/1742-6596/2270/1/012007
Autor:
T N Terentev, V S Zheltukhin, A Yu Shemakhin, I K Nekrasov, E S Samsonova, E Yu Shemakhin, I E Tsokalo, V A Tyurin
Publikováno v:
Journal of Physics: Conference Series. 2270:012014
An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e242887e21771fa458b8fcc6ead9169d
https://doi.org/10.1088/1742-6596/2270/1/012014
https://doi.org/10.1088/1742-6596/2270/1/012014
Publikováno v:
Journal of Physics: Conference Series. 1588:012062
A mathematical model of low-pressure RF plasma flow taking into consideration electron temperature influence is presented. Results of calculations of carrier gas velocity, pressure and temperature as well as electron density and electron temperature
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f1a128bc3f99cacd9b3fd3c27b055ccb
https://doi.org/10.1088/1742-6596/1588/1/012062
https://doi.org/10.1088/1742-6596/1588/1/012062
Publikováno v:
Journal of Physics: Conference Series. 1588:012018
A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::81331f48572665f3b5a919967ee272e8
https://doi.org/10.1088/1742-6596/1588/1/012018
https://doi.org/10.1088/1742-6596/1588/1/012018